Workshop: Sustainable Plasma Technologies
Plasmetrex GmbH
Schwarzschildstr. 3,
12489 Berlin
Schulungsort: Plasmetrex Schulungsraum 1.1.20
Our industry is moving fast! Under constant innovation and making remarkable progress every day. While technological knowledge and know how is going forward, consciousness is growing on some weaknesses that may blur success. With each and every new product that is set on the market, the ecological footprint grows. Year over year regulations are sharpened to damp global warming, and access to energy becomes more expensive.
In this context we offer a stage to all users of plasma tools and processes to exchange and eventually collaborate on the way to sustainable plasma technologies.
Topics that will be discussed in the Workshop:
- The current stand point: The Urge for Sustainable Plasma Processing?.
- What is the real need?
Discussion Topics/Presentations:
- Topic 1: (How to…) Save Expensive, Aggressive & Green House Process Gas
- Topic 2: Replacing Green House Gases by low GWP Gases
- Topic 3: Chamber Clean or Chamber Heating?
- Topic 4: Efficient Power Transfer for plasma tools
- Topic 5: Minimize the production of harmful byproducts
- Topic 6: Does the wafer size matter ?