• Skip to Management
  • Skip to Main menu
  • Skip to Page content
Adlershof Logo
  • WISTA
  • WISTA.Plan
  • WISTA.Service
WISTA direkt
Search
  • de
  • en
  • Adlershof Logo
  • About / Directory
    • Companies / Institutes
    • Science City in numbers
    • Direction / Maps
      • Bus / Train
      • By Car
      • Bicycle
      • Orientation / Maps
      • Trail of Thoughts
  • Newsroom
    • Overview
    • News
      • Social Media Stream
      • Success Stories
    • Events / Calendar
      • Adlershof Dissertation Award
      • Adlershof Research Forum
      • Long Night of Sciences Berlin
    • Adlershof Journal
    • Hot Topics
      • Adlershof Mission "Grand Challenges"
      • Circular Economy
      • Digital infra­structure / 5G campus network
    • Photos / Flyer / Downloads
      • Magazine archive
    • WISTA-Editorial Staff
  • Science / Technology
    • Overview
    • Technology Centres
      • Photonics / Optics
      • Biotech­nology / Envi­ron­ment
      • Micro­systems / Materi­als
      • IT / Media
      • Renewable Energy / Photovoltaics
    • Non-university Research
    • Universities / Colleges
      • Humboldt-Universität zu Berlin
      • Services for Students
    • Young Talents / STEM / School Labs
    • Start-Ups
      • Adlershof Start-Up Centre IGZ
      • Adlershof Founder’s Lab
    • Networks / Management
      • Campus Club Adlershof
  • TV / Media
    • TV and Movie Production
    • Media Services / Companies
    • News and Events
    • Filming Locations
    • Costume Hire
    • GDR Film Archive
    • Tickets / Booking
  • Properties
    • Overview
    • Real Estate Rent
      • Office Space / Workspace / Laboratories
    • Real Estate Offers
      • Commercial Properties
    • ST3AM Working Environments / Coworking
    • Residential
    • Construction
      • Building Projects
      • Architecture
      • Webcam
  • Service
    • Overview
    • Gastronomy / Sport / Culture / Shopping
    • Jobs / Market
    • Social and Healthcare Facilities
    • WISTA-Business Services
    • Event Services / Guided Tours / Hotels
    • Facility Management
    • Downloads / Photos / Videos
    • Jobs for Refugees
  • Hood
    • Overview
    • History
    • Nature Park
    • Culture
    • Technology Park
    • Digital Tours
  • WISTA
  • WISTA.Plan
  • WISTA.Service
WISTA direkt

News

  • Overview
  • News
  • Events / Calendar
  • Adlershof Journal
  • Hot Topics
  • Photos / Flyer / Downloads
  • WISTA-Editorial Staff
  • Adlershof
  • Newsroom
  • News
18. March 2021

Detection of anisotropy in the optical constants of quartz crystals for soft X-rays

In the PTB, methods for determining the optical constants of materials with synchrotron radiation have been established

© PTB
Comparison of the measured reflections for the crystal directions (100) and (001) at a fixed angle of incidence θi around the Si L2,3 absorption edges. The lower map shows the respective anisotropy. © PTB

Quartz is an important substrate material for semiconductor structures and is used in a wide variety of industrial fields, for example as a substrate for various mirrors, nanostructures or other functional surfaces features. For the development of new optical components and the corresponding modeling of the light-matter interaction, the accurate knowledge of optical material parameters is of exceeding importance.

In recent years, methods for determining the optical constants of materials with synchrotron radiation have been established in the PTB. A cooperation of the PTB (working groups 7.14 EUV Nanometrology, 7.12 EUV Radiometry and 7.24 X-ray Spectrometry) with the National Institute for Standards and Technology (NIST) in the U.S. has now resulted in improved data sets for the optical constants of quartz in the spectral range of soft X-rays. The values reconstructed from reflectance measurements not only extend the existing literature with detailed data at the silicon and oxygen absorption edges, but also substantiate the postulated anisotropy of the quartz crystal. The results were confirmed by simulations using the ab-initio Bethe-Salpeter equation developed at NIST. These simulations are critical to better predict the fine structure at the edges and opens new possibilities for chemical analysis. This new dataset is part of the ATMOC initiative for the development of a European optical constants database which is being driven by PTB.

Publication:

The anisotropy in the optical constants of quartz crystals for soft X-rays
A. Andrle, P. Hönicke, J. Vinson, R. Quintanilha, Q. Saadeh, S. Heidenreich, F. Scholze, V. Soltwisch
J. Appl. Cryst. 54, 1-7 (2020)
 

Contact:

Physikalisch-Technische Bundesanstalt
Dep. 7 Temperature and Synchrotron Radiation

Anna Andrle
7.14 EUV-Nanometrology
Email: Anna.Andrle(at)ptb.de

 

Press release PTB, 18 March 2021

Research Photonics / Optics Microsystems / Materials

Related News

  • Agreement on EUV reflectometry between PTB and ZEISS extended until the end of 2029

    Cooperation strengthens the European technology network
  • Fig. refractive index © PTB

    Catalogue of optical constants of 19 materials in the EUV range published

    PTB launches database to support the development of optical components in semiconductor industry

Related Institutions

  • Physikalisch-Technische Bundesanstalt PTB
  • LinkedInshare0
  • Facebookshare0
  • WhatsAppshare0
  • E-Mail

The development of the Science and Technology Park Berlin Adlershof was and is co-financed by the European Union namely by EFRE. This concerns infrastructure development like construction of technology centres. Furthermore EFRE is used for international projects.

  • © WISTA Management GmbH
  • Legal Notice
  • Privacy Policy
  • Social Media Guide
  • FAQ
  • Contact
  • Press
  • Newsletter
  • RSS
  • International
Member of:
Zukunftsort Adlershof Logo