FBH seminar with Prof. Tatsuo Ishijima
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Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik
Gustav-Kirchhoff-Straße 4,
12489 Berlin
Scientists will present the latest research findings on the following topic:
Improvement of Uniformity of Photoresist Ashing for a Half-Inch Wafer with Double U-Shaped Antenna Structure using a Microwave Excited Water Vapor Plasma
Prof. Tatsuo Ishijima, Kanazawa University Japan